Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter

Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65 μm using 7VDC actuation voltage.