A novel monolithic microactuator fabricated by 3D rapid direct manufacture

In this paper we present the world’s first micropump entirely fabricated using a 3D direct manufacture process based on microstereolithography. The device employs a single pneumatically actuated membrane, with flow rectification provided by a nozzle/diffuser arrangement. A maximum flow rate of just over 2,000 μl/min was achieved with a pneumatic pressure of 2 PSIG and a stroke rate of 96 Hz. The fabrication of actuator components using stereolithography apparatus (SLA) is a potentially major step towards the realisation of low-cost, disposable, rapid manufactured and fully integrated micro total analysis systems (μTAS).