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This work proposes a micro electro mechanical systems (MEMS)-based digitally controlled solenoid-inductor. The inductor is fabricated by using a MEMS process. 2-bit tuning characteristics are measured, and tuning linearity and Q -factor degradation due to switching loss are discussed. The linear inductance tuning from 1.7 to 2.2 nH was achieved at 2 GHz. A Q -factor of more than ten was observed in the frequency range of 1.2 to 7.4 GHz. The validity of the proposed inductor was confirmed by investigating the effect of switch resistance.
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Shirane et al. (2011) studied this question.
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