Superconducting films of Nb3Ge have been deposited by chemical vapor deposition. Chloride vapors were produced in situ and reduced by hydrogen. The reactor used allowed surveying of phases with varying Nb/Ge ratio. The highest transition onset temperature was 21.7 K with a transition width of 0.4 K. It occurred near the Ge-richest boundary of the Nb3Ge phase.
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Braginski et al. (1974) studied this question.
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