Hole trapping during low gate bias, high drain bias hot-carrier injection in n-MOSFETs at 77 K

Injection and trapping of holes in the gate oxide of n-channel MOS transistors during operation at large drain and small gate biases are investigated at liquid-nitrogen temperature. Experimental evidence is given that about three times less trapping of holes occurs in the gate oxide at 77 K as compared to 295 K. The authors show that this is due to the small hole mobility in SiO/sub 2/ at low temperature.>