Quantitative aspects of ion scattering spectroscopy

Ion scattering spectroscopy (ISS) shows up some important advantages compared to other surface analytical techniques. Because of its monolayer sensitivity and the negligible matrix effects, ISS is superior in depth profiling. Isolating materials such as glass or organic compounds can be analysed without any charging problem. Because of these advantages, interest in ISS has increased in recent years and has stimulated investigations into quantitative analysis. Although most scattering phenomena, which will be discussed, are well understood, some problems remain. To overcome these problems empirical calibration methods have been developed.