Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×10¹¹–2×10¹⁴W/cm²

A study was made of the efficiency of conversion of target-heating laser radiation into x rays emitted by a plasma in a wide range of laser radiation power densities (5×1011–2×1014 W/cm2) and atomic numbers of the target material (4–92). Estimates were obtained of the exposure dose needed for x-ray photolithography of resists when such a laser-plasma source of soft x rays was used.