The development of micro and nanofabrication processes with the capability to achieve three dimensional structures is of great interest for a wide variety of applications. In this paper, a replica molding process for the replication of combined micro and nanostructures in an epoxy based photo resin is reported. First, multilevel masters were realized using standard micro and nanofabrication processes. The structures from these masters were transferred to poly dimethylsiloxane PDMS stamps by soft lithography. Finally, the PDMS stamps were used for the replication of nano and microstructures in the epoxy based resin by UV casting. With this process, micro and nanostructures of minimal dimensions of 50 nm were successfully replicated. Furthermore, the capabilities of the process were confirmed by the fabrication of a microfluidic device. In this system, the surface of micro channels was structured to modify its wetting properties and create hydrophobic and hydrophilic areas without any additional chemical treatment
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Senn et al. (2010) studied this question.
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