Piezoelectric micromachined microphones with out-of-plane directivity

Piezoelectric microphones with out-of-plane directivity are introduced. Structures are comprised of circular diaphragms suspended on compliant circumferential springs and open to ambient at front and back sides. The springs contain thin piezoelectric films for integrated piezoelectric readout. Prototypes are presented in which diaphragm and springs are etched into a 10-μm-thick epitaxial Si layer with 800-nm-thick lead-zirconate-titanate films on the spring surface. Directivity and frequency response measurement confirm anticipated device functionality. A discussion of signal-to-noise ratio (SNR) merits of the approach is presented, concluding that up to 20-dB SNR improvements may be possible beyond what is achievable with present state-of-the-art commercial microphones.