Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes

A novel electromagnetic energy harvester (EH) with multiple vibration modes has been developed and characterized using three-dimensional (3D) excitation at different frequencies. The device consists of a movable circular-mass patterned with three sets of double-layer aluminum (Al) coils, a circular-ring system incorporating a magnet and a supporting beam. The 3D dynamic behavior and performance analysis of the device shows that the first vibration mode of 1285 Hz is an out-of-plane motion, while the second and third modes of 1470 and 1550 Hz, respectively, are in-plane at angles of 60° (240°) and 150° (330°) to the horizontal ( x -) axis. For an excitation acceleration of 1 g , the maximum power density achieved are 0.444, 0.242 and 0.125 µW cm −3 at vibration modes of I, II and III, respectively. The experimental results are in good agreement with the simulation and indicate a good potential in the development of a 3D EH device.