Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Qianwen Chen, Dingyou Zhang, Zhimin Tan, Zheyao Wang, Litian Liu, Jian-Qiang Lu; Thick benzocyclobutene etching using high density SF6/O2 plasmas. Journal of Vacuum Science & Technology B 1 January 2011; 29 (1): 011019. https://doi.org/10.1116/1.3532828 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology B Search Advanced Search |Citation Search
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Chen et al. (2011) studied this question.
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