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Energy transfer aspects in a capacitor-transfer-type discharge excimer laser with automatic preionization (API) have been studied to improve the laser efficiency. Detailed measurements on the discharge and output characteristics of the XeCl laser show that efficient energy transfer from the storage capacitor to the discharge capacitor is essential for improvement in the overall efficiency. The circuit analysis based on the measurements suggests that the API discharge excimer laser could be operated with an electrical efficiency of about 4%. The overall efficiencies of 2.9, 2.8, and 1.3% have been obtained with the XeCl, KrF, and ArF lasers, respectively.
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Miyazaki et al. (1986) studied this question.
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