Submicron extreme ultraviolet imaging using high-harmonic radiation

We report on experiments using high-harmonic (HH) radiation for microscopy imaging at 13 nm wavelength. A simple setup using a zone plate as objective and a back-illuminated CCD as detector yields at moderate magnifications of M≈60 a spatial resolution of δx<0.8 μm demonstrated with a sample of mica. The HH radiation was monochromatized by means of a high-efficiency multilayer monochromator consisting of two Mo/Si-mirros.