Systematics of thin films formed by excimer laser ablation: Results on SmBa2Cu3O7

Excimer laser ablation was used to prepare thin films from a bulk target of SmBa2Cu3O7. The systematic variation in film thickness, stoichiometry, and microstructure, as a function of laser fluence and angle from the target surface normal, was determined. We show that films which are stoichiometric over wide solid angles can be rapidly prepared from this material by use of high laser fluence. Films prepared from various Bi-Sr-Ca-Cu-O targets at high laser fluence also reproduce bulk stoichiometry. In contrast, films prepared by this technique from a YBa2Cu3O7 target are deficient in Ba and Cu for laser fluences required to produce compositional homogeneity over wide areas.