Dissociation and product formation in NF3 radio-frequency glow discharges

Laser Raman spectroscopy was used to measure NF3 dissociation and N2 formation in the active volume of 13.56-MHz NF3 radio-frequency (rf) discharges. Gating the rf discharge suppressed optical emission, allowing NF3 and N2 Raman measurements at rf powers where N2 production was expected to be significant. Greater than 90% dissociation of the NF3 was observed in a 750 mTorr discharge at rf power densities on the order of 1 W/cm2 , yet less than 50 mTorr of N2 was produced. NF was the only other nitrogen containing species detected in the active volume of the discharge.