Fabrication of Inverse Opal TiO₂ Waveguide Structure

Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO 2 dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO 2 on the patterned polysilane waveguide structure.