Electron swarm characteristic energies (Dr/μ) in tetrafluoromethane (CF₄) at low E/N

Electron swarm characteristic energies (D r / mu , where D r is the lateral diffusion coefficient and mu the mobility) have been measured in pure CF 4 at 293 K, using the Townsend-Huxley method. For E/N values (the ratio of applied electric field to gas number density) less than 23 Td (1 Td=10 -21 Vm 2 ), dissociative attachment does not interfere with the measurements. For E/N values between 23 and 44 Td lower and upper limits to D r / mu have been evaluated using present measurements and published attachment coefficients. A Monte Carlo simulation of electron transport through CF 4 has provided low-energy elastic and vibrationally inelastic cross sections which are consistent with measured swarm transport parameters.