We analyzed the permeability measurement error of a low permeance thin film. We clarified that the noise voltage was excited by a current loop which is composed of the coaxial cable and the ground plane. The current loop should be removed for high sensitivity of the permeameter. The permeability of a high electrical resistivity film (CoFeHfO) has been demonstrated 1 MHz–3.5 GHz.
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Yabukami et al. (1999) studied this question.
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