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January 1, 1986IEEE Transactions on Plasma Science

A Model for the Bulk Plasma in an RF Chlorne Discharge

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Authors

GRGerald L. RogoffOSRAM (United States)JKJerry KramerTE Laboratories (Ireland)RPRobert PiejakQueen's University

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Cite This Study

Rogoff et al. (1986) studied this question.

synapsesocial.com/papers/6a86a14a080301a4662d7f86https://doi.org/10.1109/tps.1986.4316512
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