A three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed using a micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can be detected by parallel shift and tilt of a seismic mass, respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by a three-dimensional sensor structure.
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Mineta et al. (1996) studied this question.