We studied a selective dry-etching method designed to reveal compositional inhomogeneity in Co–Cr alloy magnetic films. The dry etching was carried out using reactive sputtering with CO 2 as the working gas. Preferential etching of Co was confirmed by depth profiling using Auger electron spectroscopy. The compositional microstructure revealed by the dry etching was observed using scanning electron microscopy.
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Asahi et al. (1996) studied this question.
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