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November 1, 1999Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Fabrication of three-dimensional microstructures by high resolution x-ray lithography

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Authors

CCC. CuisinAlcatel Lucent (Germany)YCYin Peng ChenCentre National de la Recherche ScientifiqueDDD. DecaniniCentre National de la Recherche Scientifique

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Cuisin et al. (1999) studied this question.

synapsesocial.com/papers/6a86baec2527c72a71a23879https://doi.org/10.1116/1.591027
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