X-ray replication of masks using the synchrotron radiation produced by the ACO storage ring

Synchrotron radiation emitted by the 540-MeV storage ring of the University of Orsay was used to replicate masks with submicron features on PMM resist. Exposure times were of the order of a few minutes. The masks used were gold (1500–3500 Å thick) on 2.5-μm Mylar. Calculations show that the wavelengths principally involved in making the exposure are at 540 MeV centered around 14 Å and at 400 MeV around 50 Å.