We report the use of vacuum soft x-ray (VXR) exposure to efficiently generate paramagnetic defects in thin oxide layers. The VXR technique allows the observation of an E′ related defect called the 74-G doublet in quantities as large as the E′. This defect is the first paramagnetic defect observed in thin oxides at room temperature to involve hydrogen.
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Triplett et al. (1987) studied this question.
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