Spatial Distributions of Plasma Density in a High-Frequency Discharge with a Superimposed Static Magnetic Field

An experimental investigation has been carried out on the spatial distribution of charged-particle density in an inductively-coupled, cylindrical high-frequency plasma discharge with a superimposed perpendicular magnetic field. The studies were performed at and near conditions of electron-cyclotron-wave resonance and consideration was given to the influence of magnetic field and high-frequency power levels. It is shown that high-frequency power levels have relatively little influence on the volume distribution of charge, but that very unique distributions result under conditions of electron-cyclotron-wave resonance. Characteristic distributions are presented and discussed in the context of plasma anisotropy resulting from the superimposed magnetic field.