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July 1, 1982Journal of The Electrochemical Society

Low Pressure Deposition of Phosphosilicate Glass Films

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Authors

RLRichard LevinRoyal Hospital for ChildrenAAA. C. AdamsUniversity of Central Florida

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Levin et al. (1982) studied this question.

synapsesocial.com/papers/6a86ca6ad00295e3b4bef0b8https://doi.org/10.1149/1.2124213
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