Nanostructured titanium dioxide has many important applications, including several in chemical sensors, for example in “electronic noses”. A new method of preparing nanosized TiO 2 thin films based on rf magnetron sputtering is reported and the characterization of the resulting films described. Results are presented for the temperature variation of the electrical response of the films to NO 2 , in particular the response and recovery times of the resistance of the layer.
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Sberveglieri et al. (1996) studied this question.