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Ground-state O atoms in oxygen plasma have been detected by means of two-photon laser-induced fluorescence at 226 nm. A calibration method for obtaining the absolute O atom density was established, using O atoms produced by photodissociation of molecular oxygen with 226 nm photons. The O atom density in helicon wave oxygen discharge was determined, and a typical value was 1.3×10 19 m -3 at a gas pressure of 50 mTorr and electron density of 5.2×10 16 m -3 . Spatial and temporal variations of the O atom density have been successfully measured.
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Kadota et al. (1994) studied this question.
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