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March 1, 1997Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Atom probe determination of the multicomponent material thermo-field microprotrusion parameters

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Authors

EKE. L. KontorovichRussian Academy of SciencesMLM. V. LoginovRussian Academy of SciencesVSV. N. ShrednikRussian Academy of Sciences

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Cite This Study

Kontorovich et al. (1997) studied this question.

synapsesocial.com/papers/6a871e757fdf9298f89ecf56https://doi.org/10.1116/1.589607
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