Methods for the accurate analysis of channeling Rutherford backscattering spectrometry

The accuracy of quantitative analysis of disorder profiles in monocrystalline solids by using Rutherford backscattering spectrometry has been limited by the issues that: (1) the stopping power of channeled and nonchanneled particles differ substantially; (2) the backscattering of channeled particles from displaced atoms is hard to separate from the backscattering of dechanneled particles. In this study, we have developed a systematic approach to solve these problems by using (1) channeling stopping power to describe energy loss of incident beams for an accurate energy-depth conversion; and (2) an improved iteration process to separate the yield contribution from dechanneled ions. The unique iterative process developed in this study is able to accurately calculate the dechanneling fraction, the direct backscattering fraction and the dechanneling cross section.