Quartz crystals (Z-cuts) are implanted with Ar+ (150 keV) and He+ (35 keV) ions at room temperature. The annealing behaviour of the radiation damage between 300 and 1370 K is investigated by Rutherford backscattering spectrometry (RBS). Three stages with different thermal stability of the defects are found: 1. Simple defects produced at nuclear deposited energy densities Gn ≦ 1 × 1020 keV cm−3 can be completely annealed at 770 K. 2. Amorphized microregions generated between Gn = 1 × 1020 keV cm−3 and 2.5 × 1020 keV cm−3 fully recrystallize at 1270 K. 3. RBS-amorphous layers formed at Gn ≧ 2.5 × 1020 keV cm−3 cannot be annealed.
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Fischer et al. (1983) studied this question.
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