We demonstrate a new structure for long-wavelength (1.3-μm) vertical-cavity top-surface-emitting lasers using proton implantation for current confinement. Wafer bonded GaAs-AlAs Bragg mirrors and dielectric mirrors are used for bottom and top mirrors, respectively. The gain medium of the lasers consists of nine strain-compensated AlGaInAs quantum wells. A record low room temperature pulsed threshold current density of 1.13 kA/cm2has been achieved for 15-μm diameter devices with a threshold current of 2 mA. The side-mode-suppression-ratio is greater than 35 dB.
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Qian et al. (1997) studied this question.
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