Calculation of Inelastic Scattering Effect in the Bend Contour Electron Microscopic Images of Aluminium Single Crystals by n-Slice Approximation

Electron microscopic images of bend contours given by single crystal aluminium films have been calculated, by use of the multi-slice approximation to n -beam dynamical theory, for elastically scattered electrons and for electrons inelastically scattered by several different processes. The effects of the size and position of the objective aperture are taken into account. Comparison with experimental observations shows good agreement.