Development of a sub-nanometer positioning device: combining a new linear motor with linear motion ball guide ways

A new type of linear motor described in this note has some advantages compared with conventional motors. The attractive magnetic force between the stator (permanent magnets) and mover (armature) is diminished almost to zero. The efficiency is better because the magnetic flux leakage is very small, the size of motor is smaller and detent (force ripple) is smaller than for conventional motors. Therefore, we think that this motor is greatly suitable for ultra-precision positioning as an actuator. An ultra-precision positioning device using this motor and linear motion ball guide ways is newly developed by making the device very rigid and using a suitable control method. Moreover, the positioning performance is evaluated by a positioning resolution, and deviation and dispersion errors. As a result of repeated step response tests, the positioning resolution is 0.3 nm, with the deviation error and dispersion error (3σ) being sub-nanometer. Consequently, the positioning device achieves sub-nanometer positioning.