Facile Synthesis of Si ₃ N ₄ Nanocrystals Via an Organic–Inorganic Reaction Route

Silicon nitride (Si 3 N 4 ) nanocrystals were synthesized at about 250°C by a simple organic–inorganic reaction between CH 3 SiCl 3 and NaN 3 . The yield of Si 3 N 4 is no <70 wt% based on the amount of precursor CH 3 SiCl 3 used in the reaction and TGA analysis. X‐ray diffraction indicates the formation of a mixture of α‐ and β‐Si 3 N 4 . Particles with size from 40 to 100 nm are dominant in the products examined by transmission electron microscopy. X‐ray photoelectron spectroscopy gives an atomic ratio of Si:N around 0.75:1. The formation of nanocrystalline Si 3 N 4 during the organic–inorganic reaction goes through an intermediate product of NaSi 2 N 3 , which is important for understanding the reaction mechanism.