The strong influence of the nucleating surface on the 〈00.2〉 orientation of ZnO thin films is shown. High-quality longitudinal mode transducers are fabricated by utilizing an ``all'' sputtered technique using excess oxygen in the reactive gas mix. Electroacoustic coupling coefficients, near that of the bulk single crystal, are consistently achieved at practical deposition rates greater than 300 Å/min. Deposition details and operational parameters are specified.
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Hillman et al. (1973) studied this question.
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