Micro-Raman spectroscopy was employed to investigate the residual strain and oxygen vacancies of BaTiO 3 -based multilayer ceramic capacitors (MLCCs) with a Ni internal electrode. Strain was found to accumulate around the internal Ni electrodes layers than at other parts of the MLCCs. In addition, the number of oxygen vacancies near the internal Ni electrode was larger than that at any other parts of the MLCCs. These observations clearly show that Raman spectroscopy is extremely useful for evaluating the residual strain and oxygen vacancies in MLCC devices.
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Nishida et al. (2007) studied this question.
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