Single-mode optical waveguides fabricated from fluorinated polyimides

Buried channel optical waveguides were fabricated from fluorinated polyimides. They operated in single mode and showed an optical loss of less than 0.3 and 0.7 dB/cm for TE and TM polarizations, respectively, at a wavelength of 1.3 mum. Moreover, these waveguides had high heat and moisture resistance; the optical loss did not significantly change after heating at 380 degrees C for 1 h or after exposure to 85% relative humidity at 85 degrees C for over 200 h.