Non-equilibrium kinetics in N₂discharges and post-discharges: a full picture by modelling and impact on the applications

The main concerns associated with the establishment of a self-consistent model for N 2 discharges and post-discharges at low pressures (typically p ∼ 1 Torr), as well as in mixtures of this gas with O 2 and CH 4 are analysed and discussed. The focus is given on the coupling of the various kinetics involved: electrons, vibrational molecules N 2 , dissociated atoms N( 4 S ), ionic species, and various atomic and molecular electronic states. The impact of N 2 –O 2 and N 2 –CH 4 systems on the applications is briefly summarized by reviewing the essential kinetics. The difficulty in incorporating a self-consistent model for the surface kinetics is also discussed and a state-of-the-art approach for wall reactions is presented.