ZnO and ZnO:Li films (1-3 mu m thickness) were deposited on a soda lime glass substrate by a spray pyrolysis technique using ZnCl 2 and LiCl as starting materials. Physical properties of these films were studied as a function of substrate temperature T s and lithium concentration. The best ZnO film was obtained for T s =400 degrees C where it exhibits a conductivity of 6.3*10 -3 Omega -1 cm -1 and a mobility 104 cm 2 V -1 s -1 . X-ray and EDAX studies confirm that it is possible to obtain good transparent conducting ZnO films preferentially oriented along the c axis. When doped with lithium, amorphous films are obtained.
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Pushparajah et al. (1994) studied this question.
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