The origin of high uniaxial magnetic asnisotropy in FeCoB thin films was investigated by focusing on the changes in FeCo crystal distortion and alignment. The films were prepared by facing targets sputtering using F88.8Co27.2B4alloy targets and examined with X-ray diffraction (XRD) analysis. Preparation of a Ru underlayer showed reduction of coercivity Hcfrom 130 to 14 Oe and developed remarkably high-anisotropy field Hk, of 500 Oe. FeCo(110) of the FeCoB film with a Ru underlayer revealed an oblique crystal growth and a preferred orientation in the film plane that possessed (110) [110] along the easy axis. FeCo(110) lattice spacing has 0.5% expansion along the easy axis, which induces that the magnetoelastic energy -Eelasticof 3.8 times 105erg/cm3exists along the easy axis due to an inverse magnetostriction effect. The estimated Hkfrom the Eelasticwas 470 Oe, which corresponded well with the measured Hkof 500 Oe. This indicates that the strain in FeCo lattice is the origin of the remarkably high magnetic anisotropy.
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Hashimoto et al. (2008) studied this question.
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