Stacks of up to three tunnel junctions were fabricated using the NbN-MgO technique. Different preparation methods were tested, and two gave favorable results. In the first one, the whole stack is prepared in situ and structured afterwards by lift-off and reactive and argon ion etching. The authors investigated the resulting I-V (current-voltage) characteristics of stacks of 8.3 mV. Since it was not possible to establish electrical connections to the intermediate electrodes by this method, a second one was applied in which each NbN/MgO layer is prepared in a separate step and structured by lift-off. Here the I-V characteristics, the interaction between the tunnel junctions, and their RF properties were investigated. Shapiro steps and photon-assisted tunneling were observed in the I-V characteristics of a receiver junction, while the bottom tunnel junctions were used as microwave generators.>
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Hedbabny et al. (1989) studied this question.
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