Development of a coordinate measuring machine (CMM) touch probe using a multi-axis force sensor

Traditional touch trigger probes are widely used on most commercial coordinate measuring machines (CMMs). However, the CMMs with these probes have a systematic error due to the shape of the probe tip and elastic deformation of the stylus resulting from contact pressure with the specimen. In this paper, a new touch probe with a three degrees-of-freedom force sensor is proposed. From relationships between an obtained contact force vector and the geometric shape of the probe, it is possible to calculate the coordinates of the exact probe–specimen contact points. An empirical model of the probe is applied to calculate the coordinates of the contact points and the amount of pretravel. With the proposed probing system, the measuring error induced by the indeterminateness of the probe–specimen contact point and the pretravel can be estimated and compensated for successfully.