Spectral and Electrical Properties of a Medium Pressure, Low‐Power, RF‐Generated Postdischarge Nitrogen Plasma Jet

A method for obtaining a medium pressure ( p ∼ 1 torr), low power (< 100 W), RF‐generated plasma jet, suitable for chemical kinetics studies and technological applications is described. Though various supply gases can be used to create the plasma jet, only results on the properties of a nitrogen jet are given in this paper with an emphasis on some spectral and electrical characteristics. The emission spectra of the nitrogen jet are discussed and spatial distributions of the relative concentration of nitrogen or radical impurities emitting species such as N 2 (C 3 Π u , v ' = 0), NH( A 3 Π g , v '=0) in the bulk of the postdischarge plasma are calculated from the intensity of their vibrational bands. Electrical space resolved double probe measurements and the spatial distributions of the electron density and temperature in the plasma jet are also presented. Possible applications are shortly discussed.