Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems

In this letter, the design, fabrication, and characterization of a novel piezoelectric microtransformer with bar geometry are presented. The piezoelectric microtransformers were fabricated using PZT thin films and microelectromechanical system technologies. The dimensions of these devices are 1000×400×5.8μm3 (length×width×thickness). The dynamic displacement of around 9.2±0.064μm was observed at 10Vac. The dynamic displacement varied almost linearly with voltage. When driven at the input voltage of 3Vac, the output voltage of the piezoelectric microtransformer was 6.4Vac at the resonant frequency (Fr), 8.006kHz and load resistance (RL), 1MΩ. The average voltage gain (step-up ratio) was approximately 2.13.