It is shown that it is possible to deposit thin films with various CFx composition (1.26≤x≤1.83) by ion-beam sputtering. These materials with ‘‘teflon-like’’ composition have been deposited at room temperature by Ar ion-beam sputtering of a teflon target; the film chemical composition has been determined by electron spectroscopy for chemical analysis. The fluorine-to-carbon ratio of the films, as well as their crosslinking degree, is shown to depend on the energy of the ions impinging on the target.
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Quaranta et al. (1993) studied this question.
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