Structural, optical, and electronic properties of magnetron-sputtered platinum oxide films

Stable platinum oxide films have been prepared through magnetron sputtering and have been analyzed on the bases of energy-sensitive microanalyses, x-ray diffraction, resistivity, and optical reflectance measurements. The complex dielectric function has been determined for various oxygen contents in the film covering the wave-number regime 50 cm−1–λ−1–50 000 cm−1. The vibrational properties are dominated through a strong band, centered at 765 cm−1, associated with a asymmetric stretching mode of the Pt—O bond. The films are amorphous, with chemical composition PtOx, where 1<x<2.1, and are considered as a homogeneous solid solution of PtO and PtO2. The materials system displays a conductor–insulator transition at x≥2, in connection with an optical band gap Eg of ∼1.2 eV in the fully oxidized state. The conduction mechanism over the whole range of compositions is thermally activated and is determined through a large density of localized states extending into the band gap. At x<2 the optical gap disappears, consistent with the semimetallic behavior of the materials system for this range of composition.