Modeling the movement of electrostatic motors in a 3D finite element code

When we use a lumped parameter model for electrostatic micromotor, it is necessary to associate it with a 3D finite element code. In order to compute the lumped parameters for different positions of the rotor, we present a method, up to now scarcely employed, which allows us to take into account the movement. To solve the algebraic system thus obtained, an iterative method associated with a SSOR preconditioning is then used. The numerical model is applied to an existing motor.