Reliability Studies on AlGaN/GaN Metal-Insulator-Semiconductor High-Electron-Mobility Transistors with Through-Substrate via Technique and Backside Heat Sink Metal on Silicon-on-Insulator Substrates

Reliability Studies on AlGaN/GaN Metal-Insulator-Semiconductor High-Electron-Mobility Transistors with Through-Substrate via Technique and Backside Heat Sink Metal on Silicon-on-Insulator Substrates, Hsueh, Kuang-Po, Wang, Hou-Yu, Wang, Hsiang-Chun, Kao, Hsuan-Ling, Chien, Feng-Tso, Chen, Chih-Tien, Chang, Kuo-Jen, Chiu, Hsien-Chin