According to their materials and operating parameters, metal oxide (MOX) sensors respond to target gases only by a change in sensor resistance with a lack in selectivity. By the use of infrared spectroscopy, highly discriminatory information from samples at a molecular level can be obtained and the selectivity can be enhanced. A low-volume gas cell was developed for a commercially available semiconducting MOX methane gas sensor and coupled directly to a mid-infrared gas sensor based on substrate-integrated hollow waveguide (iHWG) technology combined with a Fourier transform infrared spectrometer. This study demonstrates a sensing process with combined orthogonal sensors for fast, time-resolved, and synergic detection of methane and carbon dioxide in gas samples.
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Glöckler et al. (2020) studied this question.
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